Equipment—Processing

RTP
RTP
Name: AccuThermo AW 410 RTP/RTA
Mfr.: Allwin21
Model: AccuThermo AW410 RTP/RTA
Type: Rapid Thermal Processing System
An oven designed for silicon wafers capable of rapidly heating them using visible light radiation; it can increase the temperature of the wafer as fast as 100 °C per second. It is designed for growth of thermal oxide layers.