Equipment—Pattern Making

Nanonex NX-2004 Nanoimprinter at the University of Houston
Nanonex NX-2004 Nanoimprinter
Name: Nanoimprinter
Mfr.: Nanonex
Model: NX-2004
Type: Nanoimprinter
The Nanonex NX-2004 Nanoimprinter provides a means to replicate mold patterns across an entire wafer with sub-10 nm resolution within a few minutes. The process is similar to embossing where a patterned mold is pressed into a deformable plastic at elevated temperatures. The molds can be designed and printed in house using the eBeam Writer. The system is equipped to perform thermal imprinting, UV imprinting and simultaneous thermal/UV imprinting.