Equipment—Etching

Reactive Ion Etcher (RIE 100)
Reactive Ion Etcher (RIE 100)
Name: Oxford Plasma Lab 100 RIE (Ar, O2)
Mfr.: Oxford Instruments
Model: Plasma Lab 100
Type: Reactive Ion Etcher
The Plasma Lab 100 is a reactive lion etcher like the Plasma Lab 80 Plus but it has been dedicated for use with non fluorocarbon gases.