Equipment—Etching

Ion Mill
Ion Mill
Name: Custom High-Rate Ion Mill
Mfr.: Veeco (Mfr for source)
Type: Ion Mill
A broad beam of neutral Argon atom bombards the surface of a sample, abrasively removing material. This system is used specifically to mill metals which are not effectively etched by RIE. It’s called an ion mill because the argon atoms are initially ionized but are neutralized by electrons before reaching the surface to be milled.