Equipment—Direct Machining

Focused Ion Beam (FIB)
Name: FEI 235 Dual-Beam Focused Ion-beam System equipped with TEM sample extraction probe
Mfr.: FEI
Model: FEI-235
Type: Dual-Beam Focused Ion Beam
The FEI 235 contains both an electron beam and a gallium ion beam; both can be used like a scanning electron microscope but the ion beam can also be used for nanoscale milling and patterning with line widths as small as 20nm. This system is also equipped with a gas injection system for metal deposition, a micromanipulator for sample interaction and an EDX detector for compositional analysis.