The University of Houston Nanofabrication Facility developed in cooperation with the Alliance for NanoHealth is a state-of-the-art cleanroom research facility equipped with an extensive toolset of nano/micro device prototyping and characterization. The Nanofabrication Facility consists of a 3,000 square feet of class 100 space and a 800 square feet of class 10 space. The Nanofabrication Facility is a self supporting facility managed by the Cullen College of Engineering. It is located on the Science and Engineering Research Compex.

The facility was constructed by the University with the support of the Alliance for NanoHealth to support the research in various high technology areas from integrated circuits to biomedical devices. Research requiring the use of the facility is inherently multidisciplinary. Faculty, staff, and students access the labs and collaborate on projects originating from Electrical & Computer Engineering, Chemical and Biomolecular Engineeering, Mechanical Engineering, University members of the Alliance for NanoHealth and industry.

Highlights from the extensive tool list include an electron beam lithography system, fourteen sputtering systems, ion beam etching and deposition systems, a wafer stepper, three contact aligners, a FIB, a CMP and two RIEs. The processing techniques utilized in the Nanofab have predominately been developed in-house for novel device fabrication. Much of the equipment has either been modified, updated, or wholly constructed by the staff to suit the needs of the research community.