For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility  
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 832-842-8845
Fax: 713-743-0544
Email: litvinov "AT" uh.edu

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ABOUT US
Cleanroom
The University of Houston Nanofabrication Facility developed in cooperation with the Alliance for NanoHealth is a state-of-the-art cleanroom research facility equipped with an extensive toolset of nano/micro device prototyping and characterization. The Nanofabrication Facility consists of a 3,000 square feet of class 100 space and a 800 square feet of class 10 space. The Nanofabrication Facility is a self supporting facility managed by the Cullen College of Engineering. It is located on the Science and Engineering Research Compex.

FACILITY
Cleanroom
The facility was constructed by the University with the support of the Alliance for NanoHealth to support the research in various high technology areas from integrated circuits to biomedical devices. Research requiring the use of the facility is inherently multidisciplinary. Faculty, staff, and students access the labs and collaborate on projects originating from Electrical & Computer Engineering, Chemical and Biomolecular Engineeering, Mechanical Engineering, University members of the Alliance for NanoHealth and industry.

EQUIPMENT
Cleanroom
Highlights from the extensive tool list include an electron beam lithography system, fourteen sputtering systems, ion beam etching and deposition systems, a wafer stepper, three contact aligners, a FIB, a CMP and two RIEs. The processing techniques utilized in the Nanofab have predominately been developed in-house for novel device fabrication. Much of the equipment has either been modified, updated, or wholly constructed by the staff to suit the needs of the research community.

Dr. Shivakumar Bhaskaran to Leave UH Nanofab
May 11, 2012

Dr. Shiva Bhaskaran will be leaving the UH Nanofab Facility to join the MRL at the University of Illinois at Urbana-Champaign. Shiva has been a valuable member of the UH Nanofab team and his steadfast support, patience and expert knowledge will be missed by all. From the Facility Director and the Facility Manager we wish you best of luck in all your future endeavors Dr. Bhaskaran.

Vacuum Science Questions?
May 09, 2012

Did you know Kurt J Lesker provides a free Technical Information Service? If you have a questions related to vacuum science and technology you can submit it to them and their experts will give you the answer absolutely free. To submit a question go here and click on the TechInfo link.

Find us on Facebook
April 18, 2012

The UH Nanofabrication Facility is now on Facebook. Visit us at www.facebook.com/UH.Nanofab