The University of Houston Nanofabrication Facility is a state-of-the-art cleanroom research facility equipped with an extensive toolset for nano and micro device prototyping and characterization. We are one of the University of Houston’s core labs and our shared equipment may be used by researchers from UH, external universities, non-profit organizations, government labs and industry. We also offer contract nanofabrication services performed by facility staff, for example, TEM sample prep.

The facility was constructed by the University of Houston with the support of the Alliance for NanoHealth. We have a 3300 square foot cleanroom including 1800 square feet of of Class 100 and 600 square feet of Class 10 space. We are located in the Science and Engineering Research Center on the UH main campus. Visit our facility page for more information about our cleanroom.

Highlights from the extensive tool list include two electron beam lithography systems, two reactive ion etchers, one deep reactive ion etcher, an ion mill, a six source UHV sputtering system, an electron beam evaporator and a dual beam FIB. Visit our equipment page for a detailed list of tools available.